Solid-source metal–organic molecular beam epitaxy of epitaxial RuO₂

A seemingly simple oxide with a rutile structure, RuO2, has been shown to possess several intriguing properties ranging from strain-stabilized superconductivity strong catalytic activity. Much interest arisen surrounding the controlled synthesis of RuO2 films, but unfortunately, utilizing atomically deposition techniques, such as molecular beam epitaxy (MBE), difficult due ultra-low vapor pressure and low oxidation potential Ru. Here, we demonstrate growth epitaxial, single crystalline films on different substrate orientations using novel solid-source metal–organic (MO) MBE. This approach circumvents these issues by supplying Ru “pre-oxidized” solid MO precursor containing High-quality epitaxial bulk-like room-temperature resistivity 55 μΩ cm were obtained at temperature 300 °C. By combining x-ray diffraction, transmission electron microscopy, electrical measurements, discuss effect temperature, orientation, film thickness, strain structure films. Our results illustrating use MBE pave way atomic-layer complex oxides “stubborn” metals, which are not only evaporate also hard oxidize.